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Click to download the DG150WW Full Spec Sheet.
Click to download the DG200WW Full Spec Sheet.
Brand New With Warranty
Applications
- Accommodates substrates mounted on film frames, tape rings or un-mounted
- Film frames for round substrates up to 8” (200mm)
- Square substrates up to 8” x 8” (200mm x 200mm)
- Typical system applications:
- Wafer cleaning after dicing
- Photo-mask cleaning
- Thin Film substrate cleaning
- Wafer flux cleaning (flip chip)
Manually Loaded Automatic Cleaning System
Features
- Microprocessor based process controller with LCD screen
- Easy to navigate on screen menus
- Digitally programmed wash and dry time parameters
- Adjustable spin speed control
- Wash spray pressure up to 2500 psi
- Cylinder actuated sweep arm with adjustable speed and travel
- N2 dry with IR heat lamp eliminates all residual water
- Large IR heat lamp shield stays cool to the touch
- Splash guard prevents contamination
- Large opening for easy access to load and unload substrate
- Interchangeable spin chucks - standard or custom designs
- Chuck vacuum, N2 pressure, exhaust and cover safety interlocks
- External house drain and exhaust
- Small footprint - custom enclosures available
System Specifications
PROCESS CONTROL SYSTEM
Reciprocating Sweep Arm:
- Wash spray and N2 dry are integrated into single arm
- Interchangeable nozzles for different spray volume
- Cylinder actuated sweeping movement
- Adjustable sweep speed, travel start and stop locations
Washing System:
- Adjustable spray pressure up to 2500 psi
- Pressure release dump valve prevents nozzle drips
Drying System:
- Adjustable N2 dry pressure
- IR heat lamp 250 Watt
Spin motor:
- Direct drive spindle with DC motor
- Spin speed 100 to 3,600 rpm
Inter Changeable Chucks (Customer Specified):
- Film frame chucks with alignment pins. Vacuum hold down of substrate and centrifugal pendulum clamps for frame
- Un-mounted substrate chucks with vacuum hold down
- O-ring chucks for photo masks
SOFTWARE
PLC Process Controller:
- Time programmable wash and dry steps (2 Steps)
- Timing Range 1 to 999 seconds (1 second increments)
- Plain English on screen operation prompts and errors
- Easy to navigate on screen menus for programming processes parameters
FACILITIES AND INSTALLATION SPECIFICATIONS
| Facilities |
Requirement* |
Hookup |
| Power Requirements |
15V AC - 60Hz - 6 Amp Max |
3 prong D- type Receptacle |
| Nitrogen |
80 psi (5, 5 bar) minimum |
¼” OD tube quick connect |
| Water |
10 psi (0, 7 bar) minimum |
1/8” Female NPT |
| Drain |
|
¾” Female NPT |
| Exhaust (If equipped) |
100 cfm max, 0.5” H2O min |
4” ID tube connection |
| Vacuum |
Internal venture generator |
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| Dimensions (L x W x H) |
22.5”x18.5”x49” (47x57x125cm) |
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| Weight |
132 lbs (60kg) |
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| Operating Temperature |
32º - 104º F (0º - 40º C) |
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*Requirements may vary depending on process |